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SEMICONDUCTOR LITHOGRAPHY

i-Line steppers

Cost-effective imaging for front and back end of the line.

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i-Line lithography stepper functions - Canon FPA-5550iZ2 FPA

FPA-5550iZ2

Optimised i-Line stepper delivering solutions for logic, memory and image sensor.

i-Line lithography stepper machine functions - Canon FPA-5510iX

FPA-5510iX

High resolution, wide-field i-Line stepper for large-field device imaging.

i-Line lithograph stepper functions - Canon FPA-3030i5

FPA-3030i5+

Superior i-Line stepper for environmentally-conscious device and MEMS manufacturers.

i-Line lithography stepper model functions - Canon FPA-5520iV

FPA-5520iV

BEOL i-Line stepper supporting higher-integration-levels and thinner-package devices

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i-Line lithography stepper machine functions - Canon FPA-6300ESW KrF scanner

KrF scanners

Canon KrF scanners feature enhanced lens capabilities and imaging technologies.

Get more from your equipment investment, with high-productivity Canon i-Line steppers

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