FPA-6300ESW
The only wide-field KrF scanner in the world that can expose a full-size CMOS image sensor in one shot.
FPA-6300ES6a
A sophisticated KrF scanner designed for high volume production, with high overlay accuracy and faster wafer handling.
FPA-3030EX6
KrF Stepper for IoT devices using substrates of varying material, sizes and thicknesses.